多結晶シリコン太陽電池における三フッ化塩素ガスおよび酸溶液によるテクスチャ化の最適化

Abstract

We have been trying to improve the characteristics of crystalline silicon-related solar cells by random texture process using dry etchant. However, the improvement has not been enough by the texture process only with the dry etching. In this study, we tried to improve cell performance by the two step texturing process with combination of dry and wet etching