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Please use this identifier to cite or link to this item: http://hdl.handle.net/10928/149

Title: 多結晶シリコン太陽電池における三フッ化塩素ガスおよび酸溶液によるテクスチャ化の最適化
Other Titles: Optimization of Texture Process of Multi-crystalline Silicon Solar Cells Using a Chlorine trifluoride Gas and an Acid Solution
Authors: 齋藤, 洋司
久保田, 祥
三田, 隆裕
SANDA, Takahiro
Keywords: multi-crystalline silicon
chlorine trifluoride
esolar cell
Issue Date: 1-Dec-2011
Publisher: 成蹊大学理工学部
Abstract: We have been trying to improve the characteristics of crystalline silicon-related solar cells by random texture process using dry etchant. However, the improvement has not been enough by the texture process only with the dry etching. In this study, we tried to improve cell performance by the two step texturing process with combination of dry and wet etching
URI: http://hdl.handle.net/10928/149
Appears in Collections:第48巻第2号

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